A new bimaterial microcantilever with tunable thermomechanical response
| Title | A new bimaterial microcantilever with tunable thermomechanical response |
|---|---|
| Author | |
| Year of Publication |
2012
|
| Journal |
Microelectronic engineering
|
| Volume |
96
|
| Number of Pages |
18-23
|
| Download citation |