Nieva, P. ., Tada, H. ., Zavracky, P. ., Adams, G. ., Miaoulis, I. ., & Wong, P. . (1998). Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors. MRS Online Proceedings Library (OPL), 546.
Publications
Filter by:
Tada, H. ., Abramson, A. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). MEMS as Temperature Sensors During High Temperature Processing. MRS Online Proceedings Library Archive, 518.
Abramson, A. ., Tadal, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). Partial Transparency Effects of Silicon During Rapid Thermal Processing. MRS Online Proceedings Library (OPL), 525.
Tada, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). Determining the high-temperature properties of thin films using bilayered cantilevers. MRS Online Proceedings Library (OPL), 546.
Tada, H. ., Abramson, A. R., Miaoulis, I. N., Wong, P. Y., Nieva, P. ., & Zavracky, P. . (1998). Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing. ASME HEAT TRANSFER DIV PUBL HTD, 361, 93-98.
Godin, J. R., Seong-hoon, W. ., Nieva, P. M., Phong, L. N., & Pope, T. . Residual Stress Dependency on Wafer Location of Thin Film PECVD Silicon Nitride. N/A.
- First page
- Previous page
- Page 1
- Page 2
- Page 3
- Page 4
- Page 5
- Page 6
- Page 7
- Page 8
- Current page 9