Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). Air viscous damping effects in vibrating microbeams [6169-23]. PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 6169, 61690N. International Society for Optical Engineering; 1999.
Publications
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Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications. Journal of Micromechanics and Microengineering, 16, 2618.
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). MEMS-based Fabry-Perot vibration sensor for harsh environments. Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, 6174, 617426. International Society for Optics and Photonics.
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). A multipurpose optical MEMS sensor for harsh environments. 2006 NSTI Nanotechnology Conference and Trade Show-NSTI Nanotech 2006 Technical Proceedings, 3, 419-422.
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). Air viscous damping effects in vibrating microbeams. Smart Structures and Materials 2006: Damping and Isolation, 6169, 61690N. International Society for Optics and Photonics.
Tada, H. ., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (2000). Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures. Journal of Applied Physics, 87, 4189-4193.
Tada, H. ., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (2000). Novel imaging system for measuring microscale curvatures at high temperatures. Review of Scientific Instruments, 71, 161-167.
Tada, H. ., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (2000). STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER (PACS 61-68, 78)-Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high. Journal of Applied Physics, 87, 4189-4193.
Abramson, A. ., Nieva, P. ., Tada, H. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1999). Effect of doping level during rapid thermal processing of multilayer structures. Journal of Materials Research, 14, 2402-2410.
Bargmann, M. ., Kumpel, A. ., Tada, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (1999). Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems. MRS Online Proceedings Library, 605, 235-240.