MEMS-based Fabry-Perot vibration sensor for harsh environments
| Title | MEMS-based Fabry-Perot vibration sensor for harsh environments |
|---|---|
| Author | |
| Year of Publication |
2006
|
| Conference Name |
Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
|
| Publisher |
International Society for Optics and Photonics
|
| Download citation |