Nieva, P. ., Adams, G. ., & McGruer, N. . (2007). Design and modeling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure, and temperature. Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 6529, 65292D. International Society for Optics and Photonics.
Reference author: NE McGruer
First name
NE
Last name
McGruer
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). Air viscous damping effects in vibrating microbeams. Smart Structures and Materials 2006: Damping and Isolation, 6169, 61690N. International Society for Optics and Photonics.
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). Air viscous damping effects in vibrating microbeams [6169-23]. PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 6169, 61690N. International Society for Optical Engineering; 1999.
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications. Journal of Micromechanics and Microengineering, 16, 2618.
Nieva, P. ., McGruer, N. ., & Adams, G. . (2006). MEMS-based Fabry-Perot vibration sensor for harsh environments. Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, 6174, 617426. International Society for Optics and Photonics.