Design and modeling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure, and temperature
| Title | Design and modeling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure, and temperature |
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| Author | |
| Year of Publication |
2007
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| Conference Name |
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007
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| Publisher |
International Society for Optics and Photonics
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| Download citation |