Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications
| Title | Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications |
|---|---|
| Author | |
| Year of Publication |
2006
|
| Journal |
Journal of Micromechanics and Microengineering
|
| Volume |
16
|
| Number of Pages |
2618
|
| Download citation |