STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER (PACS 61-68, 78)-Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high
Title | STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER (PACS 61-68, 78)-Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high |
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Author | |
Year of Publication |
2000
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Journal |
Journal of Applied Physics
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Volume |
87
|
Number of Pages |
4189-4193
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