Shavezipur, M., Nieva, P., Hashemi, S., & Khajepour, A. (2012). Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness Journal of Micromechanics and Microengineering, 22, 025022.
Reference author: M Shavezipur
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M
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Shavezipur
Shavezipur, M., Hashemi, S., Nieva, P., & Khajepour, A. (2010). Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response Microelectronic Engineering, 87, 1721-1727.
Shavezipur, M., Nieva, P., Khajepour, A., & Hashemi, S. (2009). Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range Journal of Micromechanics and Microengineering, 20, 025009.
Shavezipur, M., Nieva, P., Khajepour, A., & Hashemi, S. (2009). Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices Proc. Of the Nanotech Conference and Expo, 3-7.