Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response
| Title | Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response |
|---|---|
| Author | |
| Year of Publication |
2010
|
| Journal |
Microelectronic engineering
|
| Volume |
87
|
| Number of Pages |
1721-1727
|
| Download citation |