Size-dependent effects of surface stress on resonance behavior of microcantilever-based sensors
| Title | Size-dependent effects of surface stress on resonance behavior of microcantilever-based sensors |
|---|---|
| Author | |
| Year of Publication |
2018
|
| Journal |
Sensors and Actuators A: Physical
|
| Volume |
269
|
| Number of Pages |
505-514
|
| Download citation |