Modeling of Contact and Stiction in Electrostatic Micro-Cantilever Actuators

TitleModeling of Contact and Stiction in Electrostatic Micro-Cantilever Actuators
Publication TypeJournal Article
Year of Publication2012
AuthorsVyasarayani, C., A. Abdel-Rahman, and J. McPhee
JournalASME J. Nano. Eng. Med
Volume3
Pagination1-8
Type of ArticlePublished