Nano and Micro Systems Lab

The Nano and Micro Systems Lab (NMSL) mission is to conduct various researches in advanced micro and nanomechanical systems sensing and actuation technologies driven by the potential impacts on society and the environment.

The group objective is to address issues in overall NEMS and MEMS technologies advancement while contributing to fundamental sciences.

NMSL engaged in many areas of nanotechnology and microsystems, with a particular focus on devices and systems, experimentation, and fabrication.

Nano and Micro Systems Lab (NMSL)
Group Photo

Ongoing Research Projects


Built-In Packaging for Single Terminal Devices

In this work, we demonstrated a package-less single-terminal device not requiring conventional interconnection elements and boards. Eliminating these requirements simplifies the operation of micro and nano actuators. In fact, the idea is compatible with the current sensor technology.

Ahmet Single Terminal

Paper: Built-In Packaging for Single Terminal Devices

Built-In Packaging for Two Terminal Devices

In this research, we demonstrated the built-in packaged two-terminal device not requiring conventional interconnection elements and boards. Eliminating these requirements improves the performance of MIM-diodes. In fact, the idea is compatible with the current sensor technology and it can simplify the sensor packaging and operation.

Ahmet Two Terminal

Paper: Built-In Packaging for Two Terminal Devices

ManTech - Guelph Water Quality Sensing Partnership

Our team is excited to be working on new water sensor technologies in partnership with ManTech Inc from Guelph! We will be improving existing technologies and developing new materials for the photo-electrochemical oxidation of organics. This Photo-electrochemical Oxygen detector (PeCOD) technology will utilize thin-films, UV-excitation, and develop metamaterial solutions to improve the performance and accessibility of this critical aspect of water quality assessment. 

Pecod1
Pecod2

Paper: A Review: TiO2 based photoelectrocatalytic chemical oxygen demand sensors and their usage in industrial applications

Nano-FET Resonator Project

We aim to build the world’s most sensitive and versatile sensor in practical conditions, i.e. atmospheric pressure and ambient temperature. A novel dual-sensing approach is proposed by collecting information from both mechanical and electrical domains. In the electrical domain, information will be collected with charges from the Nanostructure Field Effect Transistor (nano-FET) property and in the mechanical domain with masses from the NEMS based Resonator property of the device.

Advanced MIM Diode Project

We are developing high-performance Metal-Insulator-Metal (MIM) diodes for terahertz applications, focusing on low resistance and high responsivity. By integrating hydrogen-doped TiOx insulators, our diodes achieve efficient quantum tunneling for ultra-fast rectification. This innovation enables next-generation THz detectors, wireless communications, and energy harvesting at room temperature and atmospheric pressure.

Manufacturing of quantum-tunneling MIM nanodiodes via rapid atmospheric CVD in terahertz band

In situ hydrogen doping of titanium dioxide via PAALD for enhanced MIM diode performance in high-frequency applications

MIM diode cover

Nanoplasmonic/FET Portable Biosensing Platform

Researchers at the University of Waterloo are using the extraordinary optical properties of plasmonic nanomaterials and nanocomposites to develop a nanoplasmonic/field-effect transistor (FET) portable biosensor. This innovative design consists of a FET biosensor, light source, and USB-enabled electronics readout unit, which aims to enhance biosensors’ sensitivity, limit of detection, lower cost, improve reusability, and detect small molecules. The results of their recent research on rGO@AuNPs nanoplasmonic biosensors are promising for next-generation early cancer diagnosis platforms.

Towards Point-of-Care Single Biomolecule Detection Using Next Generation Portable Nanoplasmonic Biosensors: A Review

Reduced graphene oxide/gold composite synthesis via laser irradiation for surface enhanced Raman spectroscopy biosensors

plasmonic image

COVID-19 Biosensors

Researchers from this project in the lab.

Researchers at the University of Waterloo have developed a COVID-19 biosensor. They are using an electronic device utilizing a graphene-based thin-film covalently functionalized with antibodies for the detection of a COVID-19 SPIKE protein. This device was demonstrated to be able to detect COVID-19 within a few minutes at ultra-low concentrations.

Paper: Electronic Detection of SARS-CoV-2 N-Protein Before the Onset of Symptoms

Research Interests

  • Self-powered nano and MEMS sensors and sensor nodes
  • Electronic packaging and interconnectors; N/MEMS on PCBs; and Nano-/micro-joining
  • Quantum electronic solids: superconductors, graphene/graphene-like materials and 2D-TDM

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