A bi-material microbeam based thermal actuator for out-of-plane rotation
| Title | A bi-material microbeam based thermal actuator for out-of-plane rotation |
|---|---|
| Author | |
| Year of Publication |
2014
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| Conference Name |
MOEMS and Miniaturized Systems XIII
|
| Publisher |
International Society for Optics and Photonics
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| Download citation |