Reference author: SM Hashemi

First name

SM

Last name

Hashemi

Shavezipur, M. ., Nieva, P. ., Hashemi, S. ., & Khajepour, A. . (2012). Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness. Journal of Micromechanics and Microengineering, 22, 025022.

Shavezipur, M. ., Hashemi, S. ., Nieva, P. ., & Khajepour, A. . (2010). Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response. Microelectronic Engineering, 87, 1721-1727.

Shavezipur, M. ., Nieva, P. ., Khajepour, A. ., & Hashemi, S. . (2009). Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range. Journal of Micromechanics and Microengineering, 20, 025009.

Shavezipur, M. ., Nieva, P. ., Khajepour, A. ., & Hashemi, S. . (2009). Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices. Proc. Of the Nanotech Conference and Expo, 3-7.