Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness
| Title | Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness |
|---|---|
| Author | |
| Year of Publication |
2012
|
| Journal |
Journal of Micromechanics and Microengineering
|
| Volume |
22
|
| Number of Pages |
025022
|
| Download citation |