Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range
| Title | Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range |
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| Author | |
| Year of Publication |
2009
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| Journal |
Journal of Micromechanics and Microengineering
|
| Volume |
20
|
| Number of Pages |
025009
|
| Download citation |