Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating
| Title | Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating |
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| Author | |
| Year of Publication |
2015
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| Journal |
Journal of Micromechanics and Microengineering
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| Volume |
25
|
| Number of Pages |
035028
|
| Download citation |