Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator [6926-05]
| Title | Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator [6926-05] |
|---|---|
| Author | |
| Year of Publication |
2008
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| Conference Name |
PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
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| Publisher |
International Society for Optical Engineering; 1999
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| Download citation |