Modeling of MEMS high-order mode inter-digital waveform synthesizer for Flexural Plate Array sensors
| Title | Modeling of MEMS high-order mode inter-digital waveform synthesizer for Flexural Plate Array sensors |
|---|---|
| Author | |
| Year of Publication |
2008
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| Conference Name |
SENSORS, 2008 IEEE
|
| Publisher |
IEEE
|
| Download citation |