A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response
Title | A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response |
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Author | |
Year of Publication |
2009
|
Journal |
Sensors & Transducers
|
Volume |
7
|
Number of Pages |
15
|
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