Size and Shape Effect in the Determination of the Fracture Strength of Silicon Nitride in MEMS Structures at High Temperatures
Title | Size and Shape Effect in the Determination of the Fracture Strength of Silicon Nitride in MEMS Structures at High Temperatures |
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Author | |
Year of Publication |
2018
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Conference Name |
2018 IEEE 68th Electronic Components and Technology Conference (ECTC)
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Publisher |
IEEE
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