Air viscous damping effects in vibrating microbeams [6169-23]
| Title | Air viscous damping effects in vibrating microbeams [6169-23] |
|---|---|
| Author | |
| Year of Publication |
2006
|
| Conference Name |
PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
|
| Publisher |
International Society for Optical Engineering; 1999
|
| Download citation |