Reference author: Patricia Nieva

First name

Patricia

Last name

Nieva

Bassiachvili, E., Stewart, R., Shavezipur, M., & Nieva, P. (2008). A MEMS capacitive, passively powered heart rate monitor: Design and analysis 2008 1st Microsystems and Nanoelectronics Research Conference, 81-84. IEEE.

Norris, R., Hamel, J., & Nieva, P. (2008). Modeling of MEMS high-order mode inter-digital waveform synthesizer for Flexural Plate Array sensors SENSORS, 2008 IEEE, 502-505. IEEE.

Tada, H., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P., Zavracky, P., … Wong, P. Y. (2000). Novel imaging system for measuring microscale curvatures at high temperatures Review of Scientific Instruments, 71, 161-167.

Tada, H., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P., Zavracky, P., … Wong, P. Y. (2000). STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER (PACS 61-68, 78)-Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high Journal of Applied Physics, 87, 4189-4193.

Tada, H., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P., Zavracky, P., … Wong, P. Y. (2000). Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures Journal of Applied Physics, 87, 4189-4193.

Bargmann, M., Kumpel, A., Tada, H., Nieva, P., Zavracky, P., Miaoulis, I. N., & Wong, P. Y. (1999). Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems MRS Online Proceedings Library, 605, 235-240.

Tada, H., Abramson, A. R., Miaoulis, I. N., Wong, P. Y., Nieva, P., & Zavracky, P. (1998). Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing ASME HEAT TRANSFER DIV PUBL HTD, 361, 93-98.

Nieva, P., Tada, H., Zavracky, P., Adams, G., Miaoulis, I., & Wong, P. (1998). Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors MRS Online Proceedings Library (OPL), 546.

Shavezipur, M., Nieva, P., Hashemi, S. M., & Khajepour, A. (2009). A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response Sensors & Transducers, 7, 15.

Sohi, A. N., Shavezipur, M., Nieva, P., & Khajepour, A. (2009). A structurally multifunctional pressure-temperature sensor 2009 2nd Microsystems and Nanoelectronics Research Conference, 65-68. IEEE.