Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs®
| Title | Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs® |
|---|---|
| Author | |
| Year of Publication |
2008
|
| Conference Name |
2008 1st Microsystems and Nanoelectronics Research Conference
|
| Publisher |
IEEE
|
| Download citation |