A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response
| Title | A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response |
|---|---|
| Author | |
| Year of Publication |
2009
|
| Journal |
Sensors & Transducers
|
| Volume |
7
|
| Number of Pages |
15
|
| Download citation |