Effect of Phosphorus Doping on the Young s Modulus and Stress of Polysilicon Thin Films
| Title | Effect of Phosphorus Doping on the Young s Modulus and Stress of Polysilicon Thin Films |
|---|---|
| Author | |
| Year of Publication |
2011
|
| Journal |
MRS Online Proceedings Library Archive
|
| Volume |
1299
|
| Download citation |