Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield

Title Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield
Author
Patricia Nieva
Jeremy Godin
Ryan Norris
Ali Sohi
Timothy Leung
Year of Publication
2012
Conference Name
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
Publisher
International Society for Optics and Photonics
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