Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator
| Title | Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator |
|---|---|
| Author | |
| Year of Publication |
2009
|
| Journal |
Microsystem technologies
|
| Volume |
15
|
| Number of Pages |
713-722
|
| Download citation |