Silicon-integrated phononic bandgap crystal platform for sensors and signal processing elements: Theory and experiment
| Title | Silicon-integrated phononic bandgap crystal platform for sensors and signal processing elements: Theory and experiment |
|---|---|
| Author | |
| Year of Publication |
2011
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| Conference Name |
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
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| Publisher |
IEEE
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| Download citation |