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Reference author: Patricia Nieva
First name
Patricia
Last name
Nieva
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Nieva, P. ., Tada, H. ., Zavracky, P. ., Adams, G. ., Miaoulis, I. ., & Wong, P. . (1998). Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors. MRS Online Proceedings Library (OPL), 546.
Shavezipur, M. ., Nieva, P. ., Hashemi, S. M., & Khajepour, A. . (2009). A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response. Sensors & Transducers, 7, 15.
Sohi, A. N., Shavezipur, M. ., Nieva, P. ., & Khajepour, A. . (2009). A structurally multifunctional pressure-temperature sensor. 2009 2nd Microsystems and Nanoelectronics Research Conference, 65-68. IEEE.
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