Sohi, N., Nieva, P., & Khajepour, A. (2013). A smaller footprint MEMS sensor for on-chip temperature measurement Reliability, Packaging, Testing, and Characterization of MOEMS MEMS and Nanodevices XII, 8614, 86140B. International Society for Optics and Photonics.
Reference author: P Nieva
First name
P
Last name
Nieva
Shavezipur, M., Nieva, P., Hashemi, S., & Khajepour, A. (2012). Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness Journal of Micromechanics and Microengineering, 22, 025022.
Sohi, N., Nieva, P., & Khajepour, A. (2012). A new bimaterial microcantilever with tunable thermomechanical response Microelectronic Engineering, 96, 18-23.
Norris, R., Hamel, J., & Nieva, P. (2011). Silicon-integrated phononic bandgap crystal platform for sensors and signal processing elements: Theory and experiment 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 636-639. IEEE.
Shavezipur, M., Hashemi, S., Nieva, P., & Khajepour, A. (2010). Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response Microelectronic Engineering, 87, 1721-1727.
Bassiachvili, E., , Nieva, P., & Khajepour, A. (2010). On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation ASME International Mechanical Engineering Congress and Exposition, 44472, 45-50.
Effa, D., Nieva, P., Andrew, Z., & Lancaster, S. (2009). Design and modeling of a MEMS accelerometer for a novel Virtual Button user interface 2009 IEEE Toronto International Conference Science and Technology for Humanity (TIC-STH), 597-602. IEEE.
Shavezipur, M., Nieva, P., Khajepour, A., & Hashemi, S. (2009). Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range Journal of Micromechanics and Microengineering, 20, 025009.
Shavezipur, M., Nieva, P., Khajepour, A., & Hashemi, S. (2009). Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices Proc. Of the Nanotech Conference and Expo, 3-7.
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