A smaller footprint MEMS sensor for on-chip temperature measurement
| Title | A smaller footprint MEMS sensor for on-chip temperature measurement |
|---|---|
| Author | |
| Year of Publication |
2013
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| Conference Name |
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
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| Publisher |
International Society for Optics and Photonics
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| Download citation |