Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing
| Title | Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing |
|---|---|
| Author | |
| Year of Publication |
1998
|
| Journal |
ASME HEAT TRANSFER DIV PUBL HTD
|
| Volume |
361
|
| Number of Pages |
93-98
|
| Download citation |