Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors
| Title | Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors |
|---|---|
| Author | |
| Year of Publication |
1998
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| Journal |
MRS Online Proceedings Library (OPL)
|
| Volume |
546
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| Download citation |