Vendor: Adixen / Pfeiffer Vacuum
Model: ASM 142
Purpose: Used for detecting and quantifying leaks in vacuum systems, sealed components, and process chambers.
Equipment description:
The ASM 142 is a helium mass-spectrometer-based leak detector designed for locating and measuring leaks in vacuum assemblies. This unit is optimized for helium tracer gas detection and is capable of identifying leak rates down to the 10⁻¹¹ mbar·L/s range, depending on configuration and test setup. The system supports both vacuum mode and sniffer mode, allowing leak detection on vacuum vessels, sealed components, and pressurized systems. The detector is suitable for verifying the vacuum integrity of deposition chambers, load locks, transfer systems, feedthroughs, seals, and custom vacuum hardware.
System features and options:
- Mass spectrometer helium leak detection for high sensitivity measurements
- Typical detection range to ~10⁻¹¹ mbar·L/s (application dependent)
- Operates in vacuum mode (connected to system under test) or sniffer mode (for pressurized part leak checks)
- Integrated roughing pump and helium detection cell assembly
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Ideal for diagnosing leaks in chambers, valves, feedthroughs, fittings, and vacuum o-ring seals
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Suitable for qualification of new vacuum hardware and troubleshooting operational pressure issues
