people working in cleanroomThe QNC cleanroom is situated on the main floor of the Mike and Ophelia Lazaridis Quantum-Nano Centre.  It is an approximately 8000 sq. ft. clean working space with lab rooms built to ISO class 6, 5 and 4 levels of particle attenuation.  The QNC cleanroom boasts over 50 tools for the fabrication and characterization of quantum and nano devices, including unique capabilities in electron beam lithography, reactive ion etching and the deposition of superconducting thin films.  The cleanroom boasts temperature control to within 1°C and humidity control to within 3% RH.  The electron beam lithography bay boasts improved temperature control to within 0.1°C and construction to control room vibrations to the VC-E level.

Equipment list