Beamer/Tracer Software Package [BEAMER]

Vendor: GenISys Gmbh

Purpose: Preparing pattern data for exposure on the JEOL JBX-6300FS

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Equipment Description:

BEAMER is a comprehensive software platform for preparing data for exposure on the JEOL JBX-6300FS. TRACER is a Monte-Carlo simulator that can compute the electron-solid interaction part of the exposure and generate a Point Spread Function (PSF) for proximity effect corrections (PEC).