Specialized equipment | Quantum-Nano Fabrication and Characterization Facility

Specialized equipment resources are managed by Prof. David Cory's group and located in various lab spaces in the RAC2 building. Access to this specialized equipment is facilitated by the QNFCF for the benefit of the University of Waterloo and Quantum Colaboratory communities.

Deposition equipment

Sputter/E-beam: Dual chamber deposition system [AJA-Sputter-EBeam]
Omicron MBE system (8 modules)*

*Due to system complexity, training on this system only available for individuals with a need for regular use. Infrequent users should pursue fee-for-service options.

Characterization Equipment

BRUKER-ESR
OMICRON-LT-STM
D8-Venture-XRD
OXFORD-20T
JANIS-12T
Lakeshore VSM
Omicron-ARPES*

*Due to system complexity, training on this system only available for individuals with a need for regular use. Infrequent users should pursue fee-for-service options.