Vendor:
Scienta
Omicron
Model:
Custom
Multi-Module
UHV
Growth
&
Analysis
System: Load-Lock
Chamber
for
MBE
System
Purpose: Introducing
wafers
into
multi-module
MBE
growth
system
and
in-situ
wafer
storage
Characteristics:
- Lamp heated outgassing of chamber (up to 200C)
- 2" diameter substrate handling (and smaller)
- Located at one end of linear transfer line & enables multi-waferloading and storage (up to 6)