A library of common process recipes is available for all lab members via the Plone "wiki style" website (authentication required) of the Quantum-Nano Fabrication and Characterization Facility. The goal of these process documents is to provide clearly documented and useful recipes for processes that are of common interest to the lab community. Documented processes include:

  • UV lithography process for S1811 positive tone photoresist
  • UV lithography process for Ma-N 1410 negative tone photoresist
  • Indium Tin Oxide thin film deposition
  • Temporary substrate bonding (for DRIE processes) with Crystalbond 555 HMP