Illustration of inert atmosphere labLocated in the University of Waterloo’s David Johnston Research and Technology Park, the RAC1 inert atmosphere lab provides access to what we call a “fab in a glovebox”.  The purpose of this lab is to enable a complete fabrication sequence including lithography, etching and deposition within an inert glovebox environment.  This lab boasts a thermal evaporator, reactive ion etcher and a JEOL IT-510 SEM with Nabity pattern generator enabling electron beam lithography. Additional to the standard fabrication toolset, there is a specialized 2D material assembly system and an AFM. These tools and more are all connected via interconnected gloveboxes enabling a complete fabrication process without ever leaving the inert environment of the glovebox.

Equipment list