The
Inert
Atmosphere
Fabrication
Lab
(IAFL)
is
a
1200
ft
2 lab
facility
located
in
the
David
Johnston
Research
and
Technology
Park
at
the
RAC
building.
This
facility
has
a
dedicated
chemistry
lab
and
a
custom-built
glovebox
system
containing
a
complete
fabrication
suite.
This
system
comprises
multiple
glovebox
stations,
each
dedicated
to
an
individual
fabrication
step,
linked
together
via
antechambers.
The
entire
system
is
under
an
inert
nitrogen
environment
and
maintains
less
than
0.1
PPM
level
of
oxygen.
The
equipment
in
this
lab
includes
a
thermal
evaporator,
reactive
ion
etcher
and
a
JEOL
IT-510
SEM
with
Nabity
pattern
generator
enabling
electron
beam
lithography. Additional
to
the
standard
fabrication
toolset,
there
is
a
specialized
2D
material assembly
system
and
an
AFM. These
tools
and
more
are
all
connected
via
interconnected
gloveboxes
enabling
a
complete
fabrication
process
without
ever
leaving
the
inert
environment
of
the
glovebox.
Equipment
list
