Vendor: Bruker
Model: Contour Elite I 3D optical metrology system
Purpose: Optical (non-contact) 3D surface characterization of a wide range of substrates and devices
Equipment description:
The Bruker Contour GT-I microscope is an optical profiler’ a tool capable of generating three dimensional surface scans of a wide range of materials and devices. It uses a fast, a non-contact technique based on optical interference to measure height variations with high accuracy over large areas (up to 1.0 mm X 1.0 mm) in a single measurement. A stitching algorithm can be applied to allow multiple images to be taken and ‘stitched’ into a single image for analysis, such that even larger areas can be measured.
System features:
- Motorized X-Y stage positioning
- 150 mm diameter maximum sample size
- 100 mm maximum sample height
- Vision64 software package for automation and analysis
- 10X and 50X are mounted on a software controlled motorized turret
- Field of view (FOV) lens 0.55X and 2X
Vertical scanning interferometry (VSI) measurement mode
- Vertical resolution ~3 nm regardless of objective.
- Rough surfaces
- Can handle abrupt steps and surface variations (slope >60°)
- Low reflectance <0.5%
- Vertical height limited only by the scanner and objective working distance
- Tested area always in focus
Phase shifting interferometry (PSI) measurement mode
- Vertical resolution <0.1 nm
- Smooth and smoothly varying surfaces
- Steps less than 130 nm
