Vendor: Inert Corporation
Model: PureLab
Purpose: General chemical processing and spin casting
Equipment description:
This glovebox workstation is dedicated to the general purpose handling of chemicals and spincasting of E-beam resists. This station is equipped with a Laurell spin coater, Torrey Pines Scientific hotplate, and a dedicated area for cleaning substrates and post metallization liftoff. This workstation is equipped with a dedicated nitrogen purifier to mitigate contamination due to fumes generated by the wet chemical processes.
System features:
- Laurell spin coat station
- Torrey Pines Scientific hotplate
- glovebox environment with dedicated nitrogen purifier
