Vendor: JEOL
Model: IT-510LV
Purpose: Scanning electron microscopy and electron beam lithography
Equipment description:
The
IT-510LV
is
a
Tungsten
filament
scanning
electron
microscope
(SEM)
with
low
vacuum
(LV)
operation
mode.
Our
IT-510LV
is
equipped
with
a
suite
of
accessories
(including
Nabity
Pattern
Generation
System)
to
enable
electron
lithography.
This
SEM
is
attached
to
a
Nitrogen
glovebox
to
enable
the
patterning
of
samples
without
leaving
the
inert
environment.
System features:
- Resolution of 3.0 nm at 30 kV and 15.0 nm at 1 kV
- Low vacuum operation mode
- Backscatter Electron Detector
-
Electron
beam
lithography
capability
- Nabity Pattern Generation System
- Deben beam blanker
- Keithley 6485 picoammeter
- Glovebox interface enabling patterning of air sensitive samples
