Vendor: Everbeing International Corp.
Model: Probe station C-8 with shielding box and vibration isolation
Purpose: Direct current (DC)-voltage (IV) and capacitance-voltage (CV) measurements on in-process or completed devices
Features
C8 probe station:
- 8″ stainless steel vacuum chuck
- Coaxial chuck stage X-Y 8″-8″
- Resolution 10 μm
- Chuck Theta 15 degrees
- Chuck up/down 4 mm
- Microscope X-Y stage travel 2″-2″
Stereo microscope:
- Eye piece 20x
- Zoom 1x-5x
- Total magnification 20x-100x (for target 20 μm x 20 μm and larger)
- LED ring light with light intensity
EB-050E micropositioners:
- Linear X-Y-Z travel 12 mm-12 mm-12 mm
- 80 threads per inch
- Stainless steel lead screw
- Magnet ON/OFF base
- For target of 1 μm x 1 μm and larger
Triaxial tubular tip holder:
- Coaxial cable 1.5 m long terminated with male Triax
- Inclination for tip soft landing
- Leakage 500 fA @ +/- 5 medium mode
Shielding box:
- Triaxial female/triaxial female x4
- Triaxial female/BNC female x4
Keithley 4200A-SCS semiconductor parameter analyzer:
- 2 source-measurement units (SMU)+1 preamp, DC voltage up to 40 V (200 V with interlock), DC current down to 10 fA, 10 aA resolution with preamp
- 1 capacitance-voltage unit (CVU), 1 kHz to 10 MHz
- IV-CV multi-switch module
- Clarius+ software application suite
Devices to be measured:
- Metal-oxide-semiconductor (MOS), metal-insulator-semiconductor (MIS), metal-insulator-metal( MIM) capacitors
- Diodes
- Transmission line measurement (TLM)
