Vendor: Filmetrics
Model: Filmetrics F40 thin film reflectometer
Purpose: Measuring thin film thickness and optical characteristics
Equipment description:
The Filmetrics F40 is able to determine thin-film characteristics by first measuring the amount of light reflected from the thin film over a range of wavelengths by measuring the reflectance spectrum of the film. This model is used in combination with a microscope camera to pinpoint precise areas of measurement on a patterned or unpatterned sample.
System Features:
- Microscope objectives 4x, 10x and 40x.
- Spot sizes of 62.5 µm, 25 µm and 6.25 µm (250 µm aperture)
- Thickness range from 20 nm to 20 µm (stack and objective dependent)
- Maximum substrate size: 100 mm wafer
- Manual sample stage and microscope turret.
- Adjustable intensity lightsource.
