Vendor: Filmetrics
Model: Filmetrics F50-UV thin film mapper
Purpose: Measuring thin film thickness and optical characteristics
Equipment description:
The Filmetrics F50 is able to map thin-film characteristics such as thin film thickness and optical constants by measuring the reflectance spectrum of a sample. The F50 is equipped with a fully automated sample stage which can accommodate samples up to 8 inches in diameter and can generate up to 2 points per second.
System features:
- Up to 8” wafer handling
- Fully automated sample stage
- Wavelength range from 200 nm to 1100 nm
- Thickness range from 5 nm to 40 µm (film stack dependent)
