Vendor: Reynoldstech
Model: Custom
Purpose: Bulk wet silicon etch via solutions of KOH
Equipment description:
The Reynoldstech bulk Si etch wetbench is dedicated to performing wet isotropic Si etching using KOH solutions. KOH solutions are capable of etching Si with a directional selectivity of over 80:1 (<100>/<111>).
This wetbench is equipped with a heated quartz tank with reflux collar and recirculation and mechanical agitation. Automated wafer rinsing is accomplished through a cascade rinse tank. This bench is also equipped with a sink and an aspirator for cleanup.
System features and options:
- Foot-pedal actuated deionized (DI) water gooseneck
- DI water spray rinse basket
- DI water and nitrogen spray guns
- Temperature-controlled quartz KOH bath with adjustable mechanical agitation
- Stirred ceramic hotplate
- Cascade-type DI water rinse tank
- Sink
- Drying rack
