Vendor: Leica Microsytems
Model: Leica EM ACE600
Purpose: Versatile high vacuum film deposition instrument for field-effect scanning electron microscope (FE-SEM) applications
Equipment description:
The Leica ACE600 sputter coater is dedicated to the deposition of thin films of iridium prior to SEM sample imaging. A thin (<10 nm) conductive film can greatly improve SEM image quality on certain samples where sample charging is an issue, without obscuring underlying surface features.
System features:
- Can handle samples mounted on aluminum SEM stubs or unmounted samples up to a maximum 4″ diameter
- Stage holder configured for 'pin-style' SEM stubs
- Optional use of quartz crystal thickness monitor or timed deposition